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Machine tool dynamics – free and forced vibrations, review of multiple degree of freedom Marc J Madou, “Fundamentals of Microfabrication: The Science of  15 Jul 2011 Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by Marc J. Madou, 9780849331800, available at Book Depository with free delivery worldwide. Rabih Zaouk, Benjamin Y. Park, and Marc J. Madou. Summary microfabrication; MicroElectroMechanical Systems; BioMEMS, microfluidics. 1. Photolithography: An a contamination-free container. If cleaning of the wafer is Madou, M. J. (2002) Fundamentals of Microfabrication: The Science of Minia- turization, 2nd ed. we offer a simple DMCA procedure to remove your content from our site. Start by pressing the button below! Report copyright / DMCA form · DOWNLOAD PDF  [5]: Madou, Marc. Fundamentals of Microfabrication. Book, editora CRC Press, 1997;. Google Scholar. [6]: Seidel,H.;Csepregi, L.; Heuberger, A.; Baumgartel,